PROCOM (PROcesses of COMpounds) is a 2/3-dimensional process simulation software package for compound semiconductor growth by Metal-Organic Chemical Vapor Deposition (MOCVD). Given the deposition reactor geometry, chemical species and growth condition parameters, PROCOM predicts the semiconductor film growth rate, composition, thickness uniformity, dopant incorporation and defect distribution based on detailed chemical kinetics and mass/heat transfer models. Please refer to our full and mini PROCOM product brochures for more details…

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