NovaTCAD is an easy to use and affordable windows based simulation package for microelectronics applications. It combines Crosslight's essential simulation tools such as MaskEditor, SimuCsuprem, SimuApsys, CrosslightView and Layerbuilder 2D/3D to provide a new simulation experience.

	SimuCSUPREM	CSUPREM is the next generation 2D/3D process simulator. SimuCSUPREM is the graphic user interface for CSUPREM with rich features like Design of Experiment (DOE), real time wizard, etc.
	SimuAPSYS	APSYS is an advanced device simulation tool. SimuAPSYS is the graphic user interface for APSYS with rich features like DOE, real time wizard, etc.
NovaTCAD	CrosslightView	CrosslightView is a powerful and easy to use plotting GUI for both process and device 2D/3D simulations. It allows user to view all the physical parameters as well as I-V curves.
	MaskEditor	MaskEditor is a one step 2D/3D layout designer. It can read the user generated GDSII files and prepare the masks for the CSUPREM process simulator.
	LayerBuilder	LayerBuilder and LayerBuilder 3D are used to build the 2D/3D device structures and basic doping information for APSYS device simulation.

Basic Features

Mode

2D, Quasi-3D, Hybrid-3D and Full 3D for process simulation
2D and Full 3D for device simulation

Stacked Mesh Planes

Easy to build quasi-3D and full 3D process simulation
Reliable and Flexible
Greatly reduced total mesh count

Process Simulation

Gauss, Pearson, SIMS data and user defined models
Auto or user controlled switch between four different etching types
Advanced full 3D diffusion models with GPU simulation option available
Strained Silicon, SiC and GaN-based material systems
Activation models for all dopants
And much more...

Device Simulation

Restart from previously saved status
Industry-leading numerical convergence
Large number of material models
Hydrodynamic models for hot carriers
Quantum tunnelling and transport
Thermionic emission model
Heat transfer equations
Deep level traps and trap dynamics
Interface states
Poole-Frenkel model
Self-consistent QW calculations
Temperature dependent model
Impact ionization
And much more...

Advanced Features

SimuGPU

GPU-accelerated solvers can achieve 3X faster simulation compared to CPU-based solvers, depending on mesh size and configuration.

GPU simulation for both CSUPREM(e.g. 3D diffusion) process simulation and APSYS device simulation is available.

UltraMerge

Perform 3D device simulation by merging two independent process simulations. Best for complicated 3D structures like interconnect simulation with substrate.

Bent Mesh Planes

Ultra high efficient mesh. Best for very complicated 3D simulations. Unique combination of straight and bent mesh planes.

AutoTCAD

AutoTCAD provides a Design of Experiment (DOE) feature.

Simulation Flow

MaskEditor		Reads GDSII files Visualize the layers Modify and creates layouts Simple Csuprem inputs available Prepares files for SimuCsuprem Files created: (geo1.in geo2.in...): Mesh information (zmesh.zst): mesh planes in the z direction (main.in): main template for process simulation (temp.in): backup and upgradable template (*.msk): mask information for each layer
SimuCSUPREM		Powerful 2D/3D Process Simulator Files created: (.aps): Main export file for APSYS simulator (.str): Saved structure files (material_2d.sol,material_3d.sol): material information (main_2d.sol,main_3d.sol): main template for APSYS
ContactDesigner		Define electrical contacts / equipotential boundaries
SimuAPSYS		Advanced 2D/3D Device Simulator Files created: (.std,.out): APSYS output files
CrosslightView		Graphical User Interface used to plot results OpenGL-based 2D/3D plots of structual data Bias-dependent curves (I-V, L-I, etc..) Files input: (.str): CSUPREM structure files (.std,*.out): APSYS output files

Tutorial movies

The following tutorials showcase how to model a simple 3D MOSFET using NovaTCAD:

Mandarin Chinese versions are available here: part 1, part 2, part 3.